handling robot

Research of Magnetic Fluid Seals Applied in Wafer Handling Robot

应用于硅片传输机器人的磁流体密封研究

Research on controller of handling robot based on industrial computer and DSP

基于IPC和DSP的六自由度搬运机器人控制器研究

Research and Development on Explosive-handling Robot Binocular Visual System Snowman formation and Handling

排爆机器人双目立体视觉系统的研究和开发雪人的形成及处理

Kinescope Handling Robot and PC Control

显像管转运机械手及其PC控制

Glass substrate handling robot is automation equipment which is used to exchange and transfer glass substrate in FPD manufacturing, and its performance directly affects production efficiency and manufacturing quality of FPD products.

玻璃基板搬运机器人是一种在平板显示产品加工过程中承担玻璃基板交换与传递的自动化设备，其性能的优劣直接影响到平板显示产品的生产效率和制造质量。

Along with the rapid development of integrate circuit ( IC), there is a high requirement of cleanliness and vacuum for the wafer processing environment, in which the wafer handling robot works.

集成电路（IC）产业的快速发展对硅片传输机器人工作环境的洁净度及真空度提出了更高的要求。

Besides, the end-effector of a wafer handling robot usually moves along some specified path in industries.

在工业生产中，晶圆移动机器人的末端执行机构通常是沿着一条固定的路径运动。

Design of collision protection system of handling robot for microfluidic chip

微流控芯片操作机器人碰撞保护装置的设计

Integrated Circuits ( IC) equipment manufacturing is the typical representative of the high-tech equipment industry, wafer handling robot is the key equipment which is responsible for transporting and locating, and its performance has a direct impact on the wafer production efficiency and manufacturing quality.

集成电路（IC）装备制造业是高技术装备产业的典型代表，硅片传输机器人是IC制造装备中负责硅片传输和定位的关键设备之一，其工作性能直接影响硅片的生产效率和制造质量。

Application of a handling robot based on the control of PLC and touch-screen

基于PLC与触摸屏控制的搬运机械手的应用

So it is significant to research on the design of magnetic fluid seal and its application on wafer handling robot working in vacuum condition. Firstly, the development and research on wafer handling robot and magnetic fluid seal technology of china and abroad is introduced in this paper.

因此，研究应用于真空硅片传输机器人的磁流体密封技术及设计方法具有重要意义。本文首先分析了国内外硅片传输机器人和磁流体密封技术的发展和研究现状。

To ensure safety for a handling robot used in polymer microfluidic chip, a reliability design was presented by researching the collision protection between handling robot and objects around.

从避免芯片操作机器人与外界环境碰撞的角度进行了安全性设计研究。

Research on Dynamical Characteristics and Structural Optimization for the Wafer Handling Robot

硅片传输机器人的动力学特性与结构优化研究

Wafer handling robot is automated material handling equipment used in Lithography machine which is the core of semiconductor manufacturing equipment. Its working speed, positioning accuracy, reliability, cleanliness impact on the lithography process directly in the production efficiency and manufacturing quality.

光刻机是半导体制造的核心装备，硅片传输机器人是其内部专用的自动物料处理设备，它的工作速度、定位精度、可靠性，使用洁净度等直接影响光刻工序中的生产效率和制造质量。